MEMS Applications

Inertial
If you are a systems designer, innovator or manufacturer of navigation systems, we can supply you with low-cost, robust MEMS-based alternatives to purely satellite-based navigation systems.

Our state-of-the-art range of inertial MEMS can be configured as accelerometers, gyroscopes and shock sensors. This innovative technology is already making an impact on the navigation market, with a dramatic improvement in the performance / cost ratio.

Silicon accelerometers and gyroscopes are micromachined at QinetiQ using the latest semiconductor material technology developed by our skilled and experienced staff.

Other applications of our inertial MEMS technologies include yaw-rate sensing, active suspension, adaptive breaking, roll-over sensing, vibration monitoring, inertial navigation, platform stabilisation and mapping systems.

If you have a tough environment that requires a neat solution, then test us.

Ultrasonics
The QinetiQ Capacitive Micromachined Ultrasonic Transducer (cMUT) can be used as both a source and detector of ultrasound in air, liquids and solids. cMUTs can be fabricated as either a discrete (single) transducer or as high-density 2D transducer arrays. Transducers can be fabricated with analogue signal conditioning electronics on the same silicon substrate. QinetiQ sensors set new standards in performance and cost.

Advances in micromachining of semiconductor materials at QinetiQ, combined with the reduction in size of sophisticated signal processing electronics, has now made it possible to produce electronic modules capable of generating and detecting ultrasonic signals. Modules can be made as small & lightweight, or as high-density, 2D integrated arrays. They can consume very little power, making them a good match with demanding requirements in medical, industrial, automotive and many other markets.

BioMEMS
QinetiQ has a world class silicon based MEMS capability which is providing microstructured platforms to interface with life sciences based on a developing portfolio of intellectual property.

In 1997 QinetiQ developed the silicon microneedle, thus enabling painless drug delivery though the skin.

Why silicon? The most pure material available, dimensional control from microns to nanometres - from cells to small drug molecules, integration with CMOS electronics and high thermal conductivity
With platform materials such as glass, polymers, silicon or nanostructures combined with biomaterials like DNA, proteins, in vivo, in vitro or cells, applications such as biosensing, tissue engineering, drug delivery, blood analysis, point of care and biocomputing can be achieved.

Multi-Sensors

The MEMS Team at QinetiQ has developed a range of Smart Sensors that have many potential applications.

Our Smart Sensor technology can detect vibration, shock, temperature and humidity. In addition, pressure and temperature sensors can assess the flow rate and levels of gases and liquids in a system. Our microphones and ultrasound sensors can also monitor local acoustic levels.

Our low cost, light weight, low power systems are an innovative response to environmental challenges. With our expert knowledge and technical abilities, we can work with you to deliver a unique capability.